Mar 25, 2019

X-Ray Topography Examination of Lattice Distortions in LEC-Grown GaAs Single Crystals

We observed lattice distortions in liquid encapsulated Czochralski (LEC)-grown GaAs crystals by double crystal reflection topography. A large variation of lattice orientation due to dislocations was observed in undoped GaAs crystals and at slippage from the wafer periphery in In-doped GaAs crystals, while a large variation of lattice spacing was observed in In-doped GaAs crystals.


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