X-Ray Topography Examination of Lattice Distortions in LEC-Grown GaAs Single Crystals
We observed lattice distortions in liquid encapsulated Czochralski (LEC)-grown GaAs crystals by double crystal reflection topography. A large variation of lattice orientation due to dislocations was observed in undoped GaAs crystals and at slippage from the wafer periphery in In-doped GaAs crystals, while a large variation of lattice spacing was observed in In-doped GaAs crystals.
Source:IOPscience
send us email at sales@powerwaywafer.com and powerwaymaterial@gmail.com
No comments:
Post a Comment