An
improved highly sensitive method of detecting photo conductivity by microwave
absorption (MDP) is described. The method is applicable to semi-insulating and
low resistivity marterial as well. It is non-destructive and can be applied to
epi-layers. MDP topograms are compared with those for photo luminescence, point
contact, and EL2 using the same sample. The MDP-contrast is mainly due to a so
far unknown recombination centre determining the carrier lifetime under
non-equilibrium. The annealing behaviour of MDP is very similar to that of the
point-contact method. In general, MDP has the potential to be used as a new
tool for material quality inspection with direct evidence for device properties.
Source:
Materials Science and Engineering: B
If
you need more information about GaAs wafer mapping by microwave-detected
photoconductivity, please visit our website:http://www.powerwaywafer.com or
send us email to powerwaymaterial@gmail.com.
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