Summary from only given. We demonstrate the CW mode locking
in a Nd:YVO/sub 4/ laser by using a single crystal GaAs wafer as
the saturable absorber as well as the output coupler. We show that by simply
changing the laser power density in the GaAs wafer either a pure
CW mode locking or a Q-switched mode locking can be achieved.
Source:IEEE
We
demonstrated an experiment of femtosecond-laser damage threshold on GaAs wafer,
the damage threshold was measured from 50 to 400fs. The mechanism was discussed
through injection power, pulse duration and ablation profile. The results
showed that the damage threshold increased with the pulse duration, the
relationship between diameter of ablation hole and laser power density was also
analyzed. It was concluded that the main factor affecting the damage threshold
was photon ionization and collision ionization.
Source:
Chao Yang Li
This paper report a statistical method of performing wafer lapping
experimental using design of experiment (DOE) technique in order to get best
lapping time to reduced thickness of GaAs wafer. Lapping speed,
lapping time, oscillator speed and weight was selected as four main factor
determine the shortest time of thickness reduction. A complete 24 factorial
of 4 factors (16 run) was design to determined the effect of selected factor.
The lapping process was carried out using ULTRATEC Lapping& Polishing
machine while the wafer thickness was characterized using Logitech
non contact gauge. It was found that best lapping parameter was using lapping
speed at 3 r.p.m, oscillator speed at 2 r.p.m and 3 weight block for duration
of 240 sec. This parameter is able to reduce 156 mum of waferwithin 240
second without any crack problems and able to give good reference of reduction
of GaAswafer thickness process period.
Source:IEEE
Inductively coupled plasma reactive ion etching (ICP-RIE) is
used in the fabrication of GaAs slab-coupled optical waveguide (SCOW)
laser and amplifier devices in order to prepare etched-ridge-waveguide surface
features. The processing of GaAs wafer pieces (less than full wafers)
requires mounting these samples on a ceramic or silicon carrier wafer by
means of a thermally conductive mounting paste to improve thermal contact
between the GaAs and carrier wafer. However, use of a mounting
paste requires additional postetch handling of samples, including mechanical
clean-up and multiple solvent cleaning steps. Insufficient paste removal can
lead to unwanted surface contamination and film adhesion issues during
subsequent sample processing. Massachusetts Institute of Technology Lincoln
Laboratory has developed an ICP-RIE process for GaAs wafer pieces
that eliminates the use of mounting paste. This process features time-limited
thermal management during etching, which is essential to maintain predictable
etch rates along with suitable etched surfaces and satisfactory sidewall
quality. Utilizing this simplified etch process for SCOW fabrication has
resulted in greatly reduced film adhesion failures and a dramatic improvement
in device yield.
Source:IEEE
The causes of micro- and macro-irregularities observed on GaAs(100) polished wafers were investigated. From the results, the wafer processes were improved so that a high-quality surface was obtained without orange peel, haze, or pits. For 3-inch wafers the flatness was improved to less than 2 μm in TTV and the warp to less than 5 μm. Improvements in the wafer processes were: development of a better polishing solution, filtering of this solution with maintenance of the pad conditions, thereby eliminating scratches, annealing at high temperature to eliminate pits, advances in slicing and lapping to reduce warp, and three-stage double-sided polishing to eliminate dimples and to improve TTV.
Source:
Journal of Crystal Growth
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We present a study of the properties of III–V structures integrated on Si by low-temperature GaAs–Si wafer bonding, using an intermediate spin-on-glass layer. Transmission electron microscopy revealed the good quality of the bonding and the absence of micro-cracks or dislocations in the semiconductor material. Photoluminescence measurements on GaAs/AlGaAs multiple quantum well structures bonded on Si confirmed that the structural integrity of the quantum wells was preserved during the wafer bonding and thinning process. Photoreflectance measurements at temperatures in the range of 80–300 K showed that the bonded GaAs layers were practically stress free at room temperature, while a tensile stress appeared at lower temperature, due to the different thermal expansion coefficients of GaAs and Si. Laser devices with etched mirrors were fabricated on silicon and exhibited similar performances with reference devices fabricated on a GaAs substrate.
Source:
Journal of Crystal Growth
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low-temperature bonding of MBE-grown GaAs wafers with Si wafers, please visit
our website:http://www.powerwaywafer.com or send us email to powerwaymaterial@gmail.com.