Low-energy
hydrogen ion bombardment is used to clean GaAs surfaces. The hydrogen ions
produce contamination-free surfaces without changes in surface composition
(stoichiometry) and surface roughness. The wafers were brought into contact at
room temperature after cleaning under ultra-high vacuum (UHV), and bonded over
the whole area (2 inches) without application of external mechanical
pressure. After bonding, the p-GaAs/n-GaAs wafer pair was annealed at
200 °C for 30 min under UHV conditions (<5×10−10 mbar) to improve the interface bonding
strength and to achieve a full-area wafer bonding.
Infrared (IR) imaging of the as-bonded wafers directly reveal the real
bonding behaviour. High-resolution transmission electron microscopy images
reveal that the wafers have been directly bonded without damage of the crystal
lattice or intermediate layer and the interface is smooth. Current–voltage
characterization shows near-ideal forward characteristics and the recombination
in p–n junction space charge region.
Source:
Vacuum
If
you need more information about Ultra-high vacuum direct bonding of a p–n
junction GaAs wafer using low-energy hydrogen ion beam surface cleaning, please
visit our website:http://www.powerwaywafer.com or send us email to
powerwaymaterial@gmail.com.
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