Jun 25, 2018

Saddle-Type Bow of As-Cut GaAs Wafers

Bow of as-cut GaAs wafers sliced by internal diameter diamond saw was studied. The crystals used were [001]-oriented GaAs grown by LEC technique. It was found that the bow of all wafers was a saddle type independent of doped impurities (undoped, Si-doped and Cr-doped). The form of saddle is related to particular crystal orientations of the zinc blende structure.


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