GaAs wafer breakage: Causes and cures, growth and process
The impact of GaAs wafer breakage on
processing facilities is discussed. Wafer strength and equipment
assessment are detailed. The authors describe many of the improvements that
have resulted in the virtual elimination of wafer breakage due to
unassignable causes. When proper material and process control techniques are
used, GaAs wafer breakage should not occur.
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